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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/24384

Title: Computational study of variations in gap size for the electrostatic levitating force of MEMS combdrive
Authors: Shiang-Woei Chyuan;Yunn-Shiuan Liao;Jeng-Tzong Chen
Contributors: NTOU:Department of Harbor and River Engineering
國立臺灣海洋大學:河海工程學系
Keywords: MEMS;Levitating force;Electrostatic;DBEM;FEM;MEMS;Combdrive
Date: 2004-09
Issue Date: 2011-10-20T08:12:00Z
Publisher: Microelectronics Journal
Abstract: Abstract:For MEMS combdrive performance, the calculation of levitating force due to electrostatic field is very important, and an accurate electrostatic analysis is essential. Because the gap size between combdrive fingers and ground plane or movable finger and fixed finger, plays a very important role for levitation, a study of the effect of gap size variation is indispensable. For diverse gaps of MEMS comdrive design, the dual BEM (DBEM) has become a better method than the domain-type FEM because DBEM can provide a complete solution in terms of boundary values only, with substantial saving in modeling effort, hence the DBEM was used to simulate the fringing of field around the edges of the fixed finger and movable finger of MEMS combdrive for diverse gap size. Results show that the less the gaps between combdrive fingers and ground plane are, the larger the levitating force acting on the movable finger is. In addition, the levitating force becomes more predominant as the gaps between movable finger and fixed finger decrease. By way of DBEM presented in this article, an accurate electrostatic field can be obtained, and the follow-up control method of levitation force for MEMS combdrive can be implemented more precisely.
Relation: 35(9), pp.739-748
URI: http://ntour.ntou.edu.tw/handle/987654321/24384
Appears in Collections:[河海工程學系] 期刊論文

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