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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23848

Title: Tribological properties of Cr–Si–N nanocomposite film adherent silicon under various environments
Authors: Hsin-Han Lin;Chau-Chang Chou;Jyh-Wei Lee
Contributors: NTOU:Department of Mechanical and Mechatronic Engineering
Keywords: Nanocomposite thin films;Pulsed DC magnetron sputtering process;Cr–Si–N films;Tribological property
Date: 2010-10
Issue Date: 2011-10-20T08:08:28Z
Publisher: Thin Solid Films
Abstract: Chromium nitride thin films have good corrosion resistance and mechanical properties. However, their hardness is slightly lower than that of other hard coatings. The concept of nanocomposite thin films is employed by adding silicon to form Cr–Si–N thin films with enhanced hardness and wear resistance. In this study, Cr–Si–N films with various Si contents were coated on silicon wafer to enhance the tribological properties and anticorrosion by a bipolar symmetry pulsed DC reactive magnetron sputtering process. The tribological properties were studied by a pin-on-disk tester. The tests were conducted with the same operating condition under three different environments. They were performed in the ambient atmosphere (in 55% humid air), DI water, and 0.01 M NaCl aqueous solution, respectively. The wear tests revealed that, as the silicon content was increased, even though the Cr–Si–N films had a better anticorrosion property they had an inferior performance on wear resistance. The results were concluded to be mainly due to Cr–Si–N films’ microstructures and adhesion to the Si substrate rather than their hardness and toughness.
Relation: 518(24), pp.7509–7514
URI: http://ntour.ntou.edu.tw/handle/987654321/23848
Appears in Collections:[機械與機電工程學系] 期刊論文

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