National Taiwan Ocean University Institutional Repository:Item 987654321/23770
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题名: Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method
作者: Chiung Fang Huang;Jeol Long Lee;Yung Kang Shen;Chi Wei Wu;Yi Lin;Sung Chih Hsu;Ming Wei Wu;Chung Yu Kao
贡献者: NTOU:Department of Mechanical and Mechatronic Engineering
國立臺灣海洋大學:機械與機電工程學系
关键词: Electroforming;Micro-Features;Replication;Surface Roughness (SR);UV-LIGA
日期: 2008-06
上传时间: 2011-10-20T08:08:12Z
出版者: Advanced Materials Research
摘要: Abstract:This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.
關聯: 47-50, pp.443-446
URI: http://ntour.ntou.edu.tw/handle/987654321/23770
显示于类别:[機械與機電工程學系] 期刊論文

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