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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23712

Title: Evaluation of Strain-Dependent Dielectric Properties in BaTiO3/LaNiO3 and (Ba,Sr)TiO3/LaNiO3 Artificial Superlattice Films on LaNiO3-Coated SrTiO3 Substrates
Authors: Yuan-Chang Liang;Hsin-Yi Lee;Heng-Jui Liu;Kun-Fu Wu;Tai-Bor Wu;Chih-Hao Lee
Contributors: NTOU:Institute of Materials Engineering
Keywords: barium compounds;strontium compounds;lanthanum compounds;internal stresses;superlattices;ferroelectric thin films;sputter deposition;dislocations;permittivity
Date: 2005
Issue Date: 2011-10-20T08:07:25Z
Publisher: Journal of The Electrochemical Society
Abstract: Abstract:We formed strained artificial superlattices of BaTiO3/LaNiO3(BTO/LNO) and (Ba0.48Sr0.52)TiO3/LaNiO3(BST/LNO) on LaNiO3-coated SrTiO3 (001) substrates by dual-gun radio-frequency magnetron sputtering. The (00L) crystal truncation rod intensity profiles confirm the formation of a superlattice structure. The BTO (or BST) sublayer in the artificial superlattice is under biaxial compressive stress whereas the LNO sublayer is under biaxial tensile stress. Both BTO/LNO and BST/LNO superlattices of total thickness ~60 nm exhibit some degree of strain relaxation, even though the modulation length is less than the critical value to generate misfit dislocations. These BTO/LNO and BST/LNO artificial superlattices show a dielectric constant significantly enhanced relative to BTO and BST single layers of the same effective thickness. From a macroscopic point of view, the strain in the superlattice structure contributes significantly to the dielectric enhancement.
Relation: 152(9), pp.F129-F132
URI: http://ntour.ntou.edu.tw/handle/987654321/23712
Appears in Collections:[材料工程研究所] 期刊論文

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