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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23708

Title: An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering
Authors: Yuan-Chang Liang;Hsin-Yi Lee;Heng-Jui Liu;Yung-Wei Hsieh;Yung-Ching Liang
Contributors: NTOU:Institute of Materials Engineering
國立臺灣海洋大學:材料工程研究所
Keywords: X-ray diffraction;X-ray reflectivity;artificial superlattices;RF sputtering
Date: 2007-01
Issue Date: 2011-10-20T08:07:23Z
Publisher: Journal of Synchrotron Radiation
Abstract: Abstract:A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to ∼50°. Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO3/LaNiO3 artificial superlattices.
Relation: 14(1), pp.163-168
URI: http://ntour.ntou.edu.tw/handle/987654321/23708
Appears in Collections:[材料工程研究所] 期刊論文

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