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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23706

Title: Characteristics of sputter-deposited BaTiO3/SrTiO3 artificial superlattice films on an LaNiO3-coated SrTiO3 substrate
Authors: Hsi-Nao Tsai;Yuan-Chang Liang;Hsin-Yi Lee
Contributors: NTOU:Institute of Materials Engineering
Keywords: A1. X-ray diffraction and reflectivity;A3. RF sputtering;A3. Superlattices;B2. Dielectric constant
Date: 2005-10-15
Issue Date: 2011-10-20T08:07:22Z
Publisher: Journal of Crystal Growth
Abstract: Abstract:Artificial superlattices consisting of BaTiO3 (BTO) and SrTiO3 (STO) sublayers were epitaxially grown on an LaNiO3-coated SrTiO3 (0 0 1) single-crystal substrate by a triple-gun radio-frequency (RF) magnetron sputtering system. X-ray reflectivity and high-resolution diffraction measurements were employed to characterize the microstructure of these films. Formation of a superlattice structure was confirmed from the appearance of Bragg peaks separated by Kiessig fringes in X-ray reflectivity curves and the (0 0 l) Bragg reflection of X-ray. The clearly discernible main feature and satellite features on both sides of the substrate about the (0 0 2) STO Bragg peak indicate the high quality of the BTO/STO artificial superlattice structure formed on a LaNiO3-coated SrTiO3 substrate. These BTO/STO artificial superlattices show a significant enhancement of dielectric constant relative to BTO and STO single layers of the same thickness. The higher the deposition temperature, the larger the dielectric constant of the films present; the smaller the stacking periodicity of superlattices, the larger the dielectric constant and dielectric loss.
Relation: 284(1-2), pp.65-72
URI: http://ntour.ntou.edu.tw/handle/987654321/23706
Appears in Collections:[材料工程研究所] 期刊論文

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