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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23686

Title: Structural and Dielectric Properties of Sputter-Deposited Ba0.48Sr0.52TiO3/LaNiO3 Artificial Superlattice Films
Authors: Hsin-Yi Lee;Heng-Jui Liu;Yuan-Chang Liang;Kun-Fu Wu;Chih-Hao Lee
Contributors: NTOU:Institute of Materials Engineering
Keywords: barium compounds;crystal microstructure;dielectric materials;dielectric thin films;lanthanum compounds;niobium;permittivity;secondary ion mass spectra;sputter deposition;strontium compounds;superlattices;X-ray diffraction;X-ray reflection
Date: 2009
Issue Date: 2011-10-20T08:07:13Z
Publisher: Journal of The Electrochemical Society
Abstract: Abstract:Artificial superlattices consisting of dielectric Ba0.48Sr0.52TiO3 (BST) and conductive LaNiO3 (LNO) were fabricated on an Nb-doped SrTiO3(001) single-crystal substrate with radio-frequency magnetron sputtering at temperatures in the range of 500–700°C. A symmetric structure with a sublayer thickness of 3 nm was deposited at varied substrate temperatures; the superlattices contained 10 periods of BST/LNO bilayers. The microstructure of these films was characterized with measurements of X-ray reflectivity and diffraction at high resolution. The formation of a superlattice structure was confirmed through the appearance of both the Bragg peaks separated by Kiessig fringes in X-ray reflectivity curves and the satellite peaks of a (002) diffraction pattern and the secondary-ion mass spectrometry profile. The clearly discernible main feature and satellite features observed in the (002) crystal truncation rod indicate the high quality of the BST/LNO artificial superlattice structure formed on a SrTiO3 substrate at all temperatures of deposition. The higher the temperature of deposition, the smaller the full width at half-maximum of the in-plane rocking curve and the better the crystalline quality. These BST/LNO artificial superlattices show a dielectric constant significantly enhanced relative to the BST single layers of the same effective thickness. Both the lattice strain and the interface quality affect the dielectric properties of the BST/LNO superlattices.
Relation: 156(8), PP.G114-G119
URI: http://ntour.ntou.edu.tw/handle/987654321/23686
Appears in Collections:[材料工程研究所] 期刊論文

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