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题名: Thickness Dependence of Structural and Electrical Properties of Electric Field Tunable Ba0.6Sr0.4TiO3 Transparent Capacitors
作者: Yuan-Chang Lian
贡献者: NTOU:Institute of Materials Engineering
关键词: barium compounds;capacitors;dielectric thin films;grain size;permittivity;strontium compounds
日期: 2009
上传时间: 2011-10-20T08:07:12Z
出版者: Electrochemical and Solid-State Letters
摘要: Abstract:This study investigates the correlation between the microstructure and the physical properties of transparent Ba0.6Sr0.4TiO3 (BST) thin films with thicknesses of 90–220 nm on the transparent conductive glass. The dielectric constant and tunability of BST films increase with thickness, as attributed to a comparatively larger grain size and a smaller tensile thermal in-plane strain in the thicker film. A BST film with an optimal thickness of 180 nm has a high tunability/loss tangent value of 34.4 and an optical transparency of over 70%.
關聯: 12(9), pp.G54-G56
显示于类别:[材料工程研究所] 期刊論文





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