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Title: Thickness Dependence of Structural and Electrical Properties of Electric Field Tunable Ba0.6Sr0.4TiO3 Transparent Capacitors
Authors: Yuan-Chang Lian
Contributors: NTOU:Institute of Materials Engineering
Keywords: barium compounds;capacitors;dielectric thin films;grain size;permittivity;strontium compounds
Date: 2009
Issue Date: 2011-10-20T08:07:12Z
Publisher: Electrochemical and Solid-State Letters
Abstract: Abstract:This study investigates the correlation between the microstructure and the physical properties of transparent Ba0.6Sr0.4TiO3 (BST) thin films with thicknesses of 90–220 nm on the transparent conductive glass. The dielectric constant and tunability of BST films increase with thickness, as attributed to a comparatively larger grain size and a smaller tensile thermal in-plane strain in the thicker film. A BST film with an optimal thickness of 180 nm has a high tunability/loss tangent value of 34.4 and an optical transparency of over 70%.
Relation: 12(9), pp.G54-G56
Appears in Collections:[Institute of Materials Engineering] Periodical Articles

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