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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23575

Title: Nanoimprint of Gratings on a Bulk Metallic Glass
Authors: J. P. Chu;H. Wijaya;C. W. Wu;T. R. Tsai;C. S. Wei;T. G. Nieh;Jeffrey Wadsworth
Contributors: NTOU:Institute of Materials Engineering
Keywords: palladium alloys;nickel alloys;phosphorus alloys;metallic glasses;diffraction gratings;nanolithography;soft lithography;scanning electron microscopy;atomic force microscopy;surface structure;nanostructured materials;optical fabrication
Date: 2007
Issue Date: 2011-10-20T08:06:39Z
Publisher: Applied Physics Letters
Abstract: Abstract:The authors demonstrate that optical gratings with 600 and 1500 nm periods on a Pd40Ni40P20 bulk metallic glass (BMG) can be faithfully imprinted in air from Si dies. Results of scanning electron microscopy, atomic force microscopy, and optical diffraction analysis show the fine line feature of ∼ 150 nm. The gratings have smooth and uniform surface profiles with comparable optical properties as the original Si dies. The BMG gratings can be further used to imprint the second-generation replicas on polymethylmethacrylate. Thereby, BMG is a suitable material not only for imprinting nanostructured parts such as gratings, but also as a good die material for nanoimprints.
Relation: 90(3), pp.034101
URI: http://ntour.ntou.edu.tw/handle/987654321/23575
Appears in Collections:[光電科學研究所] 期刊論文
[材料工程研究所] 期刊論文

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