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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/23516

Title: Mechanical properties of Mo–Ru thin films with Ni interlayer of different thickness
Authors: Chi-Yun Kang;Yung-I Chen;Chih-Hsiung Lin;Jenq-Gong Duh
Contributors: NTOU:Institute of Materials Engineering
國立臺灣海洋大學:材料工程研究所
Keywords: Mo–Ru;Ni interlayer;DC sputter;Scratch
Date: 2007-05-15
Issue Date: 2011-10-20T08:06:29Z
Publisher: Applied Surface Science
Abstract: Abstract:Noble metal coatings are usually introduced to increase lifetime of glass molding die. In this study, Mo–Ru coatings with Ni interlayer were deposited on tungsten carbide by DC sputtering processes at an elevated temperature of 550 °C to modify the properties in molding die materials. Phase identification was investigated by X-ray diffractometry (XRD). The surface morphology and composition of coatings were evaluated by atomic force microscopy (AFM) and field-emission electron probe microanalyzer (FE-EPMA), respectively. Hardness of the Mo–Ru films was measured by nanoindentation testing. In the aspects of adhesion, the influence on interlayer of different thickness was probed by the scratch test, and the different composition of Mo–Ru resulted in various kinds of fracture configurations. The scratch test exhibited spalling and chipping failure between substrate and layer.
Relation: 253(14), pp.6191-6195
URI: http://ntour.ntou.edu.tw/handle/987654321/23516
Appears in Collections:[材料工程研究所] 期刊論文

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