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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/17645

Title: 二氧化釕-三氧化二鋁與三鍗化二鉍紅外線感測器材料之特性與研究
The Characterization Study of RuO2-Al2O3 and Bi2Te3 for Infrared Sensors
Authors: Shang-Jen Tsai
蔡尚任
Contributors: NTOU:Institute of Optoelectronic Sciences
國立臺灣海洋大學:光電科學研究所
Keywords: RuO2-Al2O3;Bi2Te3;電阻式;熱電式;TCR;熱電係數
RuO2-Al2O3;Bi2Te3;bolometer;thermoelectric;TCR;Seebeck coefficient
Date: 2006
Issue Date: 2011-07-04
Abstract: 本研究主要是探討紅外線感測器的材料特性與應用。論文中將包含兩個部分。一為電阻式紅外線感測器,一為熱電式紅外線感測器。 在電阻式感測器部分,選用RuO2與Al2O3兩種材料,依照不同比例混合,最後找出比例為30% RuO2-70% Al2O3作為靶材,並且在基板溫度為100℃的狀況下以濺鍍方式成長的薄膜為最佳。此條件成長的薄膜電阻溫度係數TCR可達-1.66 %/K。片電阻率在300 K時則為146 KΩ。最後將此條件導入元件製程當中,製成紅外線感測元件。元件量測結果在交流頻率為0.2~20 Hz條件下,元件的響應度在0.2 Hz可達最大值517.34274 (VW-1)。證實RuO2-Al2O3薄膜可運用在電阻式紅外線感測器中。 在熱電式紅外線感測元件部分,選用目前室溫狀態下熱電效應最好的Bi2Te3為材料,並以電化學沈積的方式成長薄膜於ITO基板上,找出Bi=0.004 M,Te=0.005 M的電解液比例下能沈積出較強健的結構,並進一步發現在250 ℃環境下熱處理兩小時之後會有較佳的熱電效應,其熱電係數可達-68μV/K。最後將此配方與步驟運用於成長單根柱狀結構的紅外線感測元件中。元件量測結果在交流頻率為0.2~10Hz條件下,元件的響應度在1Hz可達最大值401.6688(VW-1)。證實此材料可運用於單根柱狀結構的紅外線感測元件當中。
This research mainly studied material characteristics and the applications of infrared sensors. The experiment was divided into two parts, one was bolometer and the other was thermoelectric. In bolometer experiment, I choose to use RuO2 and Al2 O3. The optimal conditions were 30% RuO2-70% Al2O3 at 100℃ by sputter. The TCR can reach up to -1.66% / K; and the resistivity was about 1.46KΩ at 300 K. The frequency was under the condition of 0.2∼20Hz. We found that the maximal response was at 0.2 Hz and resulted to 517.34274 (VW-1 ). In thermoelectric experiment, I selected Bi2Te3 . Bi2Te3 ¬is the best thermoelectric material at room temperature. The experiment applied electrochemistry deposits in SU8 holes. The ideal ratio for the experiment was Bi =0.004M and Te =0.005M. We found that there was better thermoelectric efficiency after annealing the sample at 250℃. The Seebeck coefficient can reach up to -68μV. The frequency was under the condition of 0.2∼10Hz. We found that the maximal response was at 1 Hz and resulted to 401.6688 (VW-1 ).
URI: http://ethesys.lib.ntou.edu.tw/cdrfb3/record/#G0M94880009
http://ntour.ntou.edu.tw/ir/handle/987654321/17645
Appears in Collections:[光電科學研究所] 博碩士論文

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